High-frequency on-off valve
AssigneeSMC Corporation
InventorsSHINICHI YOSHIMURA, HIROMICHI YOSHIOKA
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AssigneeSMC Corporation
InventorsSHINICHI YOSHIMURA, HIROMICHI YOSHIOKA
Estimating the term…
A high-frequency on-off valve includes a valve chamber communicating with an input flow path, output orifices opening into the valve chamber, a plate-shaped valve member disposed within the valve chamber such that the valve member is movable into and out of contact with output valve seats surrounding the output orifices, and an electromagnetic operating section that opens and closes the valve member. The high-frequency on-off valve opens and closes the plurality of output orifices by bringing the valve member into and out of contact with the output valve seats by utilizing an effect of an electromagnetic attraction force produced by the electromagnetic operating section and an effect of fluid pressure within the valve chamber. The valve has the plurality of output orifices that are long-hole-shaped.
A high-frequency on-off valve comprising:
Dependencies are inferred from the claim text.