Charged particle device

A charged particle device comprising:

• a cylindrical column;
• a charged particle beam optical system disposed in the column;
• and
• a sample stage disposed on the column;
• and
• a support device supporting the column,
• wherein:
• the support device includes a simply supported structure simply supporting the column at a plurality of support points set along an axial line direction of the column;
• and
• the support points for the column are disposed at positions corresponding to the positions of nodes of vibration of a beam simply supported at both ends, the column being considered as the beam.

A charged particle device comprising:

• a cylindrical column;
• a charged particle beam optical system disposed in the column;
• a sample stage disposed on the column;
• and
• a support device supporting the column,
• wherein:
• the support device includes a simply supported structure simply supporting the column at a plurality of support points set along an axial line direction of the column;
• the support points for the column are disposed at positions corresponding to the positions of nodes of vibration of a beam having free ends at both ends, the column being considered as the beam;
• projections are disposed on an outer periphery of the column at positions corresponding to the support points;
• and
• the column is supported by the support device via the projections of the column.