Vibration isolation module and substrate processing system

Module according to any one of the preceding claims, wherein the module includes at least two pendulum rods, and wherein the positions at which the pendulum rods are connected to the intermediate body are adjustable.

Module according to any one of the preceding claims, wherein the at least one spring element is a leaf spring (130).

Module according to any one of the preceding claims, wherein the at least one pendulum rod is provided with a damping element.

Module according to any one of the preceding claims, wherein the at least one pendulum rod is provided with a flexure point.

Module according to any one of the preceding claims, wherein the at least one pendulum rod is provided with two flexure points, the rod being connected to the intermediate body at a position above the upper flexure point, and being connected to the support body at a position below the lower flexure point.

Module according to any one of the preceding claims, wherein the at least one pendulum rod has a length that exceeds the height of a column of the substrate processing apparatus.

Module according to any one of the preceding claims, wherein the support body is provided with a damping element.

Substrate processing system comprising a vibration isolation module (101) according to any one of the preceding claims, the system further comprising:

• a moveable target support structure for supporting a substrate to be exposed by the lithographic apparatus or inspection apparatus;
• and
• a control system for moving the module and the target support structure relative to each other.