Charged-particle microscope

A charged particle microscope, comprising:

• a stage holding a sample to be measured;
• a charged particle optical tube that detects a secondary signal generated by two-dimensional scanning a charged particle beam onto the sample and having an objective lens that focuses the charged particle beam onto the sample and a height measuring device that measures a height of the sample;
• and
• a controller controlling the objectice lens,
• wherein the objective lens is configured by a plurality of lenses including an electromagnetic lens and an electrostatic lens,
• wherein the controller calculates a set value of the electromagnetic lens based on an average height of the sample before the stage starts moving the sample to a target observation position for the first time, and
• wherein the controller calculates a set value of the electrostatic lens based on a height of the sample at a stop position of the stage after the stage starts moving the sample to the target observation position.