Sample Carrier for an Electron Microscope
AssigneeFEI Company
InventorFrank Nederlof
Life of this patent
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Abstract
The invention relates to a sample carrier for a transmission electron microscope. When using state of the art sample carriers, such as half-moon grids in combination with detectors detecting, for example, X rays emitted at a large emittance angle, shadowing is a problem. Similar problems occur when performing tomography, in which the sample is rotated over a large angle. The invention provides a solution to shadowing by forming the parts of the grid bordering the interface between sample and grid as tapering parts.
Claims20
A sample carrier for carrying a sample in an electron microscope, the sample carrier comprising a metal foil, the sample carrier comprising at least one mounting position bordering a lateral side of the metal foil for attaching a sample thereto, wherein the mounting position borders a part of the sample carrier in which the thickness of the metal foil is reduced.
Dependencies are inferred from the claim text.