Method of analyzing a sample and charged particle beam device for analyzing a sample
AssigneeCarl Zeiss Microscopy GmbH
InventorsEdward Hill, Stewart Bean
Life of this patent
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Abstract
The invention refers to a method and a charged particle beam device for analyzing an object using a charged particle beam interacting with the object. The object comprises a sample embedded in a resin. Interaction radiation in the form of cathodoluminescence light is detected for identifying areas in which the resin is arranged and in which the sample is arranged. Interaction particles are detected to identify particles within the resin and the sample for further analysis by using EDX analysis.
Claims21
-8. (canceled)
A method of analyzing an object using a charged particle beam device, the charged particle beam device comprising a charged particle source to generate a charged particle beam, an objective lens to focus the charged particle beam onto the object, a first detector to detect interaction radiation and a second detector to detect interaction particles, the object comprising a sample and a resin, the method comprising:
- generating the charged particle beam using the charged particle source;
- using the objective lens to guide the charged particle beam onto the sample and the resin;
- guiding the charged particle beam over the sample and the resin;
- generating interaction radiation emitted from the sample and the resin due to interaction of the charged particle beam with the sample and the resin;
- detecting the interaction radiation using the first detector to identify a first area in which the resin is arranged and to identify a second area in which the sample is arranged;
- identifying a position of at least one particle of the resin in the first area or at least one particle of the sample in the second area by detecting interaction particles using the second detector, the interaction particles being generated by the interaction of the charged particle beam with the at least one particle of the resin or of the at least one particle of the sample;
- and
- using the charged particle beam to analyze the at least one particle of the resin or of the at least one particle of the sample.
A method of analyzing an object which comprises a sample and a resin, the method comprising:
- detecting interaction radiation emitted by the object to identify a first region of the object which comprises the resin and a second region of the object which comprises the sample, the interaction radiation being generated by scanning a charged particle beam over the object;
- detecting interaction particles to identify a position of a portion of the sample or a portion of the resin, the interaction particles being generated by the interaction of the charged particle beam with the portion of the sample or the portion of the resin;
- and
- using the charged particle beam to analyze the portion of the resin or of the portion of the sample.
Dependencies are inferred from the claim text.