Substrate support with switchable multizone heater

A substrate support, comprising:

• a multilayer heater comprising:
• a first member to distribute heat to a substrate when present above a first planar surface of the first member;
• a second member disposed beneath the first member, the second member including a plurality of resistive heating elements, wherein the plurality of resistive heating elements provide local temperature compensation to the first member to heat the substrate when present;
• a third member disposed beneath the second member, the third member including one or more base heating zones to provide a base temperature profile to the first member;
• and
• a fourth member disposed beneath the third member, the fourth member including a first set of electrical conductors coupled to each of the resistive heating elements;
• a plurality of substrate support pins disposed on the first planar surface of the first member to support a backside surface of a substrate when present on the substrate support;
• a plurality of lift pins holes formed through each of the first, second, third and fourth members;
• a plurality of substrate lift pins movably disposed in the plurality of lift pins holes and configured to move the substrate onto the plurality of substrate support pins;
• and
• a control system coupled configured to receive input from the plurality of resistive temperature detectors and to control each of the plurality of resistive heating elements, wherein the control system includes a first multiplexor electrically coupled to the plurality of resistive heating elements and a second multiplexor electrically coupled to the plurality of resistive temperature detectors.