Separating apparatus

A separating apparatus for separating a composite substrate into a first substrate and a second substrate previously bonded to each other, said separating apparatus comprising:

• a support base having a supporting surface for supporting said composite substrate in a horizontal condition;
• side surface supporting means provided on said support base for supporting the peripheral side surface of said composite substrate placed on said supporting surface;
• and
• separating means for applying a separating force to the boundary between said first substrate and said second substrate constituting said composite substrate supported to said supporting surface of said support base and said side surface supporting means, thereby separating said composite substrate into said first substrate and said second substrate;
• said separating means including
• a separating member provided in parallel relationship with said supporting surface of said support base at a position opposed to said side surface supporting means, said separating member having a wedge portion adapted to be penetrated into the boundary between said first substrate and said second substrate,
• separating member positioning means for moving said separating member in a direction perpendicular to said supporting surface of said support base to thereby position said wedge portion at the height of the boundary between said first substrate and said second substrate, and
• separating member advancing and retracting means for advancing and retracting said wedge portion of said separating member with respect to the boundary between said first substrate and said second substrate constituting said composite substrate supported to said supporting surface of said support base and said side surface supporting means.