Scanning Acoustic Microscope with an Inverted Transducer and Bubbler Functionality

A scanning acoustic microscope, comprising:

• a transducer mounted in a cup below a particular elevation;
• a coupling fluid source disposed below the particular elevation, which is configured to introduce coupling fluid into the cup;
• a pump connected to the cup for pressurizing the coupling fluid before it enters the cup;
• and
• a controller operable to control the transducer and the coupling fluid source during testing such that ultrasonic energy is directed upwardly through coupling fluid disposed between and contacting the transducer and a first surface of a part to be tested,
• wherein the part is disposed at the particular elevation and wherein a second surface of the part is not contacted by coupling fluid during testing.

A method of scanning a part using a scanning acoustic microscope comprising the steps of:

• mounting a transducer mounted in a cup below a particular elevation;
• disposing a coupling fluid source at the particular elevation, wherein the coupling fluid source is configured to introduce coupling fluid into the cup;
• and
• providing a controller for controlling the transducer and the coupling fluid source during testing such that ultrasonic energy is directed upwardly through coupling fluid disposed between and contacting the transducer and a bottom surface of the part to be inspected,
• wherein the part is disposed at the particular elevation and wherein an upper surface of the part is not contacted by coupling fluid during testing.