Topography simulation apparatus, topography simulation method and recording medium

A topography simulation method comprising:

• dividing a surface of a substance into a plurality of computing elements;
• extending straight lines in a plurality of directions from each computing element, and determining whether each straight line contacts the surface of the substance and determining which computing element each straight line contacts;
• and
• calculating, based on results of the determinations, a direct flux which is a flux of a reactive species directly reaching each computing element, and a form factor indicating a positional relationship between the computing elements,
• wherein
• when the determinations are performed to calculate the form factor in a case where an ionic species reaching each computing element is reflected, the determinations are performed by setting a cut-off angle for a reflection direction of the ionic species, and limiting the directions in which the straight lines are extended within a range of the cut-off angle, and
• when a straight line from a first computing element among the plurality of computing elements contacts a second computing element, it is judged whether a straight line from the first computing element contacts a third computing element surrounding the second computing element, and judged whether the third computing element is positioned within the range of the cut-off angle of the first computing element,
• the judgments comprising selecting, as the third computing element, a computing element directly adjacent to the second computing element, and a computing element indirectly adjacent to the second computing element through one or more computing elements each having positive results of the judgments, and the judgments being repeated until there is no candidate for the third computing element to be selected.

A non-transitory computer-readable recording medium containing a topography simulation program which causes a computer to perform a topography simulation method, the method comprising:

• dividing a surface of a substance into a plurality of computing elements;
• extending straight lines in a plurality of directions from each computing element, and determining whether each straight line contacts the surface of the substance and determining which computing element each straight line contacts;
• and
• calculating, based on results of the determinations, a direct flux which is a flux of a reactive species directly reaching each computing element, and a form factor indicating a positional relationship between the computing elements,
• wherein
• when the determinations are performed to calculate the form factor in a case where an ionic species reaching each computing element is reflected, the determinations are performed by setting a cut-off angle for a reflection direction of the ionic species, and limiting the directions in which the straight lines are extended within a range of the cut-off angle, and
• when a straight line from a first computing element among the plurality of computing elements contacts a second computing element, it is judged whether a straight line from the first computing element contacts a third computing element surrounding the second computing element, and judged whether the third computing element is positioned within the range of the cut-off angle of the first computing element,
• the judgments comprising selecting, as the third computing element, a computing element directly adjacent to the second computing element, and a computing element indirectly adjacent to the second computing element through one or more computing elements each having positive results of the judgments, and the judgments being repeated until there is no candidate for the third computing element to be selected.