Displacement detecting device and scale
AssigneeDmg Mori Seiki Co., Ltd.
InventorHideaki TAMIYA
Life of this patent
Estimating the term…
Loading patent…
AssigneeDmg Mori Seiki Co., Ltd.
InventorHideaki TAMIYA
Estimating the term…
A scale has marks whose pitch interval changes along a measurement direction in a manner that can be approximated to a quadratic or higher-order polynomial. A comparing unit calculates a difference between first relative position information and second relative position information per unit displacement in a position where a first displacement detecting unit is arranged. Then, an absolute position computing unit computes an absolute position in the measurement direction with respect to the scale based on absolute position information and the relative position information of at least one of the first relative position information and the second relative position information, and outputs the absolute position.
A displacement detecting device comprising:
A scale comprising marks whose pitch interval can be approximated to a quadratic or higher-order polynomial along a measurement direction, or changes randomly on one surface.
Dependencies are inferred from the claim text.