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US 2014/0194673 A1Published application
Piezoelectric-based, self-sustaining artificial cochlea
AssigneeWright State University
InventorsRobert A. Goldenberg, Yan Zhuang, Jared Allen Evans
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Abstract
Piezoelectric transducer arrays and methods of making the same are discussed. Such an array can include a piezoelectric film comprising a plurality of segments. Adjacent segments can be separated by trenches of a plurality of trenches in the piezoelectric film. Additionally, such an array can include a plurality of electrodes attached to the plurality of segments.
Claims20
A device, comprising:
- a piezoelectric film comprising a plurality of segments, wherein adjacent segments are separated by a trench of a plurality of trenches in the piezoelectric film;
- and
- a plurality of electrodes attached to the plurality of segments.
A method, comprising:
- obtaining a piezoelectric film;
- etching a plurality of trenches in the piezoelectric film, wherein the plurality of trenches defines a plurality of segments of the piezoelectric film;
- and
- attaching a plurality of electrodes to the plurality of segments.
1 more element
Dependencies are inferred from the claim text.