Fluorine-Containing Aromatic Compound and Method for Producing Same
AssigneeCentral Glass Company, Limited
InventorsJunya Nakatsuji, Makoto Matsuura, Kazuhiro Yamanaka
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AssigneeCentral Glass Company, Limited
InventorsJunya Nakatsuji, Makoto Matsuura, Kazuhiro Yamanaka
Estimating the term…
Disclosed is a fluorine-containing aromatic compound represented by the following general formula (1) and its production method. In the formula (1), R1 is a hydroxyl group or amino group, each of R2 to R5 is independently a hydrogen atom, or a C1-4 straight chain or a C3 or C4 branched chain alkyl group, hydrogen atoms of the alkyl group may partially or totally be replaced with fluorine atoms, n is an integer of 0 to 2, and each of m and l is independently 0 or 1. A polymer derived from this fluorine-containing aromatic compound contains —C(CF3)2OH group at a position away from the polymer main chain. Therefore, it is useful for resist use.
A fluorine-containing aromatic compound represented by the general formula (1):
A method for producing a fluorine-containing aromatic compound represented by the general formula (1):
Dependencies are inferred from the claim text.