Method and system for forming absorber layer on metal coated glass for photovoltaic devices
AssigneeTSMC Solar Ltd.
InventorsEdward TENG, Ying-Chen CHAO, Chih-Jen YANG
Life of this patent
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AssigneeTSMC Solar Ltd.
InventorsEdward TENG, Ying-Chen CHAO, Chih-Jen YANG
Estimating the term…
An apparatus for forming a solar cell includes a housing defining a vacuum chamber, a rotatable substrate support, at least one inner heater and at least one outer heater. The substrate support is inside the vacuum chamber configured to hold a substrate. The at least one inner heater is between a center of the vacuum chamber and the substrate support, and is configured to heat a back surface of a substrate on the substrate support. The at least one outer heater is between an outer surface of the vacuum chamber and the substrate support, and is configured to heat a front surface of a substrate on the substrate support.
An apparatus for forming a solar cell, comprising:
An apparatus for forming a solar cell, comprising:
15-20. (canceled)
An apparatus for forming a solar cell, comprising:
Dependencies are inferred from the claim text.