Process for producing a liquid ejection head
AssigneeCanon Kabushiki Kaisha
InventorsTetsushi Ishikawa, Tamaki Sato
Life of this patent
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AssigneeCanon Kabushiki Kaisha
InventorsTetsushi Ishikawa, Tamaki Sato
Estimating the term…
A process for producing a liquid ejection head including, on a substrate, a flow path forming member forming ejection orifices and a liquid flow path communicating therewith, including forming, on the substrate, a first layer of photosensitive resin; forming, on the first layer, a mask layer in which at least part of a side surface thereof has a light transmission distribution with a material capable of reducing transmission of light having a photosensitive wavelength of the resin; performing, for the first layer, exposure with the mask layer and development to form a flow path mold pattern having a taper angle θ satisfying 95°<θ, where θ is the angle between top and side surfaces in cross section of the pattern perpendicular to substrate surface; forming a coating resin layer to cover the pattern; patterning the resin layer to form the member; and removing the pattern to form the flow path.
A process for producing a liquid ejection head including, on a substrate, a flow path forming member that forms an ejection orifice for ejecting liquid and a liquid flow path communicating with the ejection orifice, the process comprising:
Dependencies are inferred from the claim text.