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AssigneeNanyang Technological University
InventorsQihua Xiong, Xinlong Xu, Jun Zhang
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A method of generating a metamater-operable in the visible-infrared range is provided. The method comprises a) depositing a layer of a conductive material on a substrate; b) forming a layer of electron beam resist on the layer of conductive material; c) patterning the layer of electron beam resist using electron beam lithography to form a patterned substrate; d) depositing a layer of a noble metal on the patterned substrate; and e) removing the resist. A metamaterial operable in the visible-infrared range comprising split-ring resonators having a least line width of about 20 nm to about 40 nm on a substrate is provided. A transparent photonic device or a sensor for chemical or biological sensing comprising the metamaterial is also provided.
A method of fabricating a sensor having a metamaterial comprising split-ring resonators operable in the visible-infrared range, the method comprising
2-11. (canceled)
A metamaterial operable in the visible-infrared range fabricated by a method, the method comprising:
A sensor for chemical or biological sensing comprising a metamaterial operable in the visible-infrared range comprising split-ring resonators having a least line width of about 20 nm to about 40 nm on a substrate.
31-45. (canceled)
Dependencies are inferred from the claim text.