Absorptive wire-grid polarizer and optical apparatus
AssigneeCanon Kabushiki Kaisha
InventorYutaka Yamaguchi
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AssigneeCanon Kabushiki Kaisha
InventorYutaka Yamaguchi
Estimating the term…
The absorptive wire-grid polarizer includes a periodic structure formed on a substrate surface of a dielectric substrate and constituted by a metal and one or more dielectric materials. The periodic structure has a one-dimensional grating structure in which, in a sectional plane orthogonal to a normal to the substrate surface, grating portions of a metal grating formed of the metal and grating portions of dielectric gratings formed of the one or more dielectric materials are one-dimensionally arranged with a grating period P. The Conditions of nm≧1.0, km≧2.0, 0.01≦FF≦0.25, Nb≧1.40, and h≧250 [nm] are satisfied where h represents an entire height of the metal and dielectric gratings, nm represents a refractive index of a real part of a complex refractive index of the metal, km represents an extinction coefficient of an imaginary part of the complex refractive index, and nb represents an average refractive index of the dielectric grating.
An absorptive wire-grid polarizer comprising:
An optical apparatus comprising:
Dependencies are inferred from the claim text.