Ellipsometry system

An ellipsometry system for analyzing an object to be measured using polarization, comprising:

• a polarization beam generation unit that has a light source, and generates a polarization beam based on an outgoing light beam emitted from the light source;
• a polarization beam splitter that splits the generated polarization beam into a first polarization beam and a second polarization beam;
• a reference polarization beam unit that generates, from the first polarization beam, a reference polarization beam to be used as reference light when generating a tomographic image;
• a measurement unit that irradiates the object to be measured with the second polarization beam, and outputs an object-reflected polarization beam reflected from the object to be measured based on such irradiation;
• a detection unit that receives an interference polarization beam obtained by causing the reference polarization beam and the object-reflected polarization beam to interfere with each other and detects the interference polarization beam on a different polarization component basis;
• and
• a generation unit that generates the tomographic image of the object to be measured based on the polarization beam detected on a polarization component basis,
• wherein the detection unit has:
• a diffraction grating that separates the received interference polarization beam into a plurality of interference polarization beams on a wavelength basis as separated interference polarization beams;
• a polarization optical element that:
• has a birefringence characteristic including a first refractive index and a second refractive index;
• receives the separated interference polarization beams of the respective wavelengths in a wavelength order and in a parallel manner;
• separates the separated interference polarization beam of each wavelength into a plurality of separated interference polarization components on a polarization component basis as separated polarization components while transmitting the same, and outputs the respective separated polarization components in each wavelength in the same direction but along different optical axes;
• and
• detection section that has two sensor arrays detecting light intensities of the interference polarization beams of each wavelength separated on a polarization component basis, respectively, the two sensor arrays being arranged side by side with a predetermined distance interval therebetween, and
• wherein a thickness in a transmission direction in the polarization optical element through which the interference polarization beams transmit is different for each wavelength of the interference polarization beam.