Inspection apparatus

An inspection method for detecting defects or haze of a sample, comprising the steps of:

• illuminating light to the sample from an oblique direction relative to a surface of the sample;
• detecting first forward scattered light scattering toward a forward direction relative to an illuminating direction from the sample to generate a first signal;
• detecting second scattered light at a sideward or backward position relative to the illuminating direction from the sample to generate a second signal;
• and
• processing the first signal of the first scattered light and the second signal of the second scattered light with different weighting for the first signal and for the second signal,
• wherein first detection optics detects the first scattered light scattering toward the forward position relative to the illuminating direction, and
• wherein second detection optics detects the second scattered light scattering toward the sideward and backward direction relative to the illuminating direction, and
• further comprising detecting haze by performing a first weighting process on the first and second signals and detecting defects by performing a second weighting process on the first and second signals.

An inspection apparatus for inspecting a sample, comprising:

• an illuminating optical system that illuminates a light to the sample from an oblique direction relative to a surface of the sample;
• a first detecting optical system that detects a first scattered light at a first elevation angle relative to the surface of the sample to generate a first signal;
• a second detecting optical system that detects a second scattered light at a second elevation angle which is a different angle than the first elevation angle relative to the surface of the sample to generate a second signal;
• and
• a processing system that processes the first signal and the second signal with a different weighting for the first signal and for the second signal.