Film thickness measurement apparatus and film thickness measurement method
AssigneeMitsubishi Heavy Industries, Ltd.
InventorsMasaaki Kurokawa, Jun Yasui, Keiichi Kenmotsu, Shigetoshi Shiotani
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AssigneeMitsubishi Heavy Industries, Ltd.
InventorsMasaaki Kurokawa, Jun Yasui, Keiichi Kenmotsu, Shigetoshi Shiotani
Estimating the term…
A film thickness measurement apparatus includes: an ECT sensor for measuring a film thickness of a thermal barrier coating formed on a turbine blade; a storage unit for storing a measurement point on the turbine blade which is a point where the film thickness of the thermal barrier coating is measured; a laser displacement meter for measuring a shape of the turbine blade; a measurement position calculation unit for calculating an actual measurement point suitable for actual film thickness measurement using the ECT sensor, based on the shape of the turbine blade measured by the laser displacement meter and the measurement point on the turbine blade stored in the storage unit; and an arm drive unit for driving the ECT sensor to adjust a measurement position of the ECT sensor based on the actual measurement point calculated by the measurement position calculation unit.
A film thickness measurement apparatus comprising:
A film thickness measurement method comprising the steps of:
Dependencies are inferred from the claim text.