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US 2014/0192118 A1Published application
Piezoelectric inkjet die stack
AssigneeHewlett-Packard Development Company, L.P.
InventorsTony S. Cruz-Uribe, Joseph E. Scheffelin, Tsuyoshi Yamashita, Silam J. Choy
Life of this patent
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Abstract
A piezoelectric inkjet die stack includes a circuit die stacked on a substrate die, a piezoelectric actuator die stacked on the circuit die, and a cap die stacked on the piezoelectric actuator die. Each die in succession from the circuit die to the cap die is narrower than the previous die.
Claims20
A piezoelectric inkjet die stack comprising:
- a circuit die stacked on a substrate die;
- a piezoelectric actuator die stacked on the circuit die;
- and
- a cap die stacked on the piezoelectric actuator die;
- wherein each die in succession from the circuit die to the cap die is narrower than a previous die.
2 more elements
A piezoelectric inkjet printhead comprising:
- a pressure chamber formed in a piezoelectric actuator die;
- a roof to the pressure chamber comprising a membrane and a piezoelectric actuator on the membrane;
- a circuit die adhered to the actuator die and forming a floor to the pressure chamber that is opposite the roof;
- and
- control circuitry fabricated on the circuit die at the floor of the pressure chamber to controllably flex the membrane by activating the piezoelectric actuator.
2 more elements
Dependencies are inferred from the claim text.