Electric field emitting source, element using same, and production method therefor
AssigneeKorea University Research and Business Foundation
InventorsCheol Jin Lee, Dong Hoon Shin, Ji Hong Shin
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Abstract
An electric field emitting source is equipped with an electron emitting film which comprises a nano-sized electron emitting substance and has a first surface and a second surface constituting the surface opposite thereto, and a cathode which secures one end of the electron emitting film and comprises a first block and a second block respectively corresponding to the first surface and the second surface of the electron emitting film.
Claims20
A field emission source comprising:
- an electron emission film containing nano-sized electron emission materials and having a first surface and a second surface opposite to the first surface;
- and
- a cathode comprising a first block corresponding to the first surface and a second block corresponding to the second surface to fix one end of the electron emission film.
A field emission device comprising:
- an electron emission film containing nano-sized electron emission materials and having a first surface and a second surface opposite to the first surface;
- a cathode comprising a first block and a second block corresponding to the first surface and the second surface of the electron emission film, respectively, to fix one end of the electron emission film;
- a substrate that supports the cathode;
- and
- an anode formed on the other side of the substrate, facing to the electron emission film.
A method for fabricating a field emission device, the method comprising:
- forming a first block, which is an element of a cathode, on one side of a substrate;
- forming a sacrificial layer having a surface with the same height as that of the first block on a part, in which the first block is not formed;
- forming an electron emission film by using electron emission materials on a surface of the first block and a surface of the sacrificial layer;
- forming a second block corresponding to the first block on the electron emission film;
- and
- removing the sacrificial layer so that the electron emission film has a gap from the substrate, and fixing an end of the electron emission film in the state that it is inserted between the first and second blocks.
Dependencies are inferred from the claim text.