Pressure-Sensitive Adhesive Sheet for Immobilization of Imprint Mold, Imprint Apparatus, and Imprint Method

A pressure-sensitive adhesive sheet for immobilization of an imprint mold, which is a pressure-sensitive adhesive sheet used for integrally immobilizing an imprint mold to a pressure application unit in an imprint apparatus for transferring a profile of a fine pattern formed on the imprint mold to a transfer-receiving body by pressing the imprint mold having the fine pattern thereon against the transfer-receiving body,

• said pressure-sensitive adhesive sheet having a substrate, a pressure-sensitive adhesive layer (A) provided on one surface of the substrate and a pressure-sensitive adhesive layer (B) provided on the other surface of the substrate,
• wherein the pressure-sensitive adhesive layer (A) is used for being bonded to the pressure application unit of the imprint apparatus, and the pressure-sensitive adhesive layer (B) is used for being bonded to the imprint mold,
• the adhesive strength of the pressure-sensitive adhesive layer (B) at 23° C. is higher than the adhesive strength of the pressure-sensitive adhesive layer (A) at 23° C., and
• the pressure-sensitive adhesive layer (A) has an adhesive strength of 1 to 10 N/25 mm at 23° C. and an adhesive strength of 1 to 30 N/25 mm after allowed to stand for 7 hours at 80° C. and a humidity of 65%, and the pressure-sensitive adhesive layer (B) has an adhesive strength of 3 to 30 N/25 mm at 23° C.