Device design for partially oriented rutile dielectrics
AssigneeIntermolecular, Inc.
InventorsSergey Barabash, Dipankar Pramanik
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AssigneeIntermolecular, Inc.
InventorsSergey Barabash, Dipankar Pramanik
Estimating the term…
Methods include forming a dielectric layer from a first material above a substrate. The dielectric layer is formed such that a preferred crystal direction for at least one electrical property of the first material is parallel to a surface of the dielectric layer. Next, forming a first and second trench within the dielectric layer wherein the first and second trenches have at least one curved portion. Forming a second material within the first trench and a third material within the second trench wherein the first material is different from the second and third materials. The first and second trenches are separated by a distance between 3-20 nm.
A method for forming a capacitive device, the method comprising:
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A capacitive device comprising:
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Dependencies are inferred from the claim text.