US 2014/0191358 A1 · Two-Portion Shallow-Trench Isolation

Abstract

A shallow trench isolation (STI) and method of forming the same is provided. The STI structure comprises an upper insulating portion and a lower insulating portion, wherein the lower insulating portion includes a first insulator and an insulating layer surrounding the first insulator, the upper insulating portion includes a second insulator and a buffer layer surrounding the second insulator. A part of the buffer layer interfaces between the first insulator and the second insulator, and the outer sidewall of the buffer layer and the sidewall of the first insulator are leveled.

Claims19

Dependent claims

A shallow trench isolation structure, comprising:

an upper insulating portion and a lower insulating portion in a trench of a substrate, wherein said lower insulating portion comprises a first insulator and an insulating layer on the sidewall and the bottom of said first insulator, said upper insulating portion comprises a second insulator and a buffer layer on the sidewall and the bottom of said second insulator, a part of said buffer layer interfaces between said first insulator and said second insulator, and the outer sidewall of said buffer layer and the sidewall of said first insulator are leveled.

Dependencies are inferred from the claim text.

Facts

Application

13/736,082Filed 8 Jan 2013

Published

10 Jul 2014

Term ends

Not estimatedThe source records don’t support an estimate.

Classification11 codes

H10D 62/116
Dielectric isolations, e.g. air gaps: adjoining the input or output regions of field-effect devices, e.g. adjoining source or drain regions
H10D 62/115
Isolations within a component, i.e. internal isolations: dielectric isolations, e.g. air gaps
H10W 10/014
Of isolation regions comprising dielectric materials: using trench refilling with dielectric materials, e.g. shallow trench isolations
H10W 10/0147
Of trenches having shapes other than rectangular or V-shape: the shapes being altered by a local oxidation of silicon process, e.g. trench corner…

Two-Portion Shallow-Trench Isolation

Life of this patent

Two-Portion Shallow-Trench Isolation

Life of this patent

Abstract

Claims19