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US 2014/0191342 A1Published application
Mems sensor
AssigneeHitachi Automotive Systems, Ltd.
InventorsIchiro Ohsaka, Kazunori Ohta
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Abstract
There is provided a MEMS sensor including a signal processing LSI equipped with a temperature sensor for measuring temperature of a sensor, and a MEMS sensor chip overlaid on the signal processing LSI, the MEMS sensor chip being mounted on a heat generating part of the signal processing LSI. This MEMS sensor decreases the effects caused by thermally triggered changes in temperature characteristics.
Claims8
A MEMS sensor comprising:
- a signal processing LSI equipped with a temperature sensor for measuring temperature of a sensor;
- and
- a MEMS sensor chip overlaid on said signal processing LSI, wherein
- said MEMS sensor chip is mounted on a heat generating part of said signal processing LSI.
1 more element
Dependencies are inferred from the claim text.