Back to results
US 2014/0191332 A1Published application
Pfet devices with different structures and performance characteristics
AssigneeGlobalfoundries Inc.
InventorsHans-Juergen Thees, Stephan Kronholz, Peter Javorka
Life of this patent
Estimating the term…
Abstract
Disclosed herein is a device that includes a first PFET transistor formed in and above a first active region of a semiconducting substrate, a second PFET transistor formed in and above a second active region of the semiconducting substrate, wherein at least one of a thickness of the first and second channel semiconductor materials or a concentration of germanium in the first and second channel semiconductor materials are different.
Claims31
1-19. (canceled)
A device, comprising
- a first PFET transistor formed in and above a first active region of a semiconducting substrate, said first PFET transistor comprising a first layer of channel semiconductor material;
- and
- a second PFET transistor formed in and above a second active region of said semiconducting substrate, said second PFET transistor comprising a second layer of channel semiconductor material, wherein at least one of a thickness of said first and second channel semiconductor materials or a concentration of germanium in said first and second channel semiconductor materials are different.
A device, comprising
- a first PFET transistor formed in and above a first active region of a semiconducting substrate, said first PFET transistor comprising a first layer of silicon germanium;
- and
- a second PFET transistor formed in and above a second active region of said semiconducting substrate, said second PFET transistor comprising a second layer of silicon germanium, wherein at least one of a thickness of said first and second layers of silicon germanium or a concentration of germanium in said first and second layers of silicon germanium are different.
A device, comprising
- a first PFET transistor formed in and above a first active region of a semiconducting substrate, said first PFET transistor comprising a first layer of silicon germanium;
- and
- a second PFET transistor formed in and above a second active region of said semiconducting substrate, said second PFET transistor comprising a second layer of silicon germanium, wherein a thickness of said first and second layers of silicon germanium are different and a concentration of germanium in said first and second layers of silicon germanium are different.
Dependencies are inferred from the claim text.