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US 2014/0191252 A1Published application
Complementary metal oxide semiconductor device, optical apparatus including the same, and method of manufacturing the same
AssigneeSamsung Electronics Co., Ltd.
InventorsSang-moon LEE, Young-jin CHO
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Abstract
A complementary metal oxide semiconductor (CMOS) device includes an n-type first transistor on a silicon substrate, the n-type first transistor including a Group III-V compound semiconductor substrate, and a p-type second transistor on the silicon substrate, the p-type second transistor including a germanium based substrate.
Claims20
A complementary metal oxide semiconductor (CMOS) device comprising:
- a n-type first transistor on a silicon substrate, the n-type first transistor including a first substrate, the first substrate including a Group III-V compound semiconductor;
- and
- a p-type second transistor on the silicon substrate, the p-type second transistor including a second substrate, the second substrate including germanium.
An optical apparatus comprising:
- a CMOS device on a silicon substrate, the CMOS device including,
- a n-type first transistor including a first substrate, the first substrate including a Group III-V compound semiconductor, and
- a p-type second transistor including a second substrate, the second substrate including germanium;
- and
- an optical device on the silicon substrate separate from the CMOS device.
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A method of manufacturing a CMOS device, the method comprising:
- forming a first substrate on a silicon substrate;
- exposing a portion of the silicon substrate by removing a portion of the first substrate;
- forming a second substrate on the exposed portion of the silicon substrate, the second substrate insulated from the first substrate;
- forming a first transistor on one of the first and second substrates;
- and
- forming a second transistor on the other one of the first and second substrates,
- wherein one of the first and second substrates is a Group III-V compound semiconductor substrate, and the other one of the first and second substrates is a germanium based substrate.
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Dependencies are inferred from the claim text.