Method to make rf-pcm switches and circuits with phase-change materials

A radio frequency switch comprising:

• a first transmission line;
• a second transmission line;
• a first electrode;
• a second electrode;
• and
• a phase change material;
• the first transmission line coupled to a first area of the phase change material, the second transmission line coupled to a second area of the phase change material, the first electrode coupled to a third area of the phase change material, and the second electrode coupled to a fourth area of the phase change material;
• wherein when a direct current is sent from the first electrode to the second electrode through the phase change material, the phase change material changes state from a high resistance state to a low resistance state allowing transmission from the first transmission line to the second transmission line;
• and
• wherein the radio frequency switch is integrated on a substrate.

A method of making a radio frequency switch comprising:

• forming an insulator on a substrate;
• forming a first transmission line on the insulator and coupled to a first area of a phase change material;
• forming a second transmission line on the insulator and coupled to a second area of the phase change material;
• forming a first conductor connected to a third area of the phase change material;
• forming a first electrode connected to the first conductor;
• forming a second conductor connected to a fourth area of the phase change material;
• and
• forming a second electrode connected to the second conductor.

A reconfigurable circuit comprising;

• a first circuit comprising at least a first radio frequency switch integrated with circuitry comprising GaN based transistors or III-IV bipolar transistors;
• the first radio frequency switch comprising:
• a first transmission line;
• a second transmission line;
• a first electrode;
• a second electrode;
• and
• a phase change material;
• wherein the first transmission line coupled to a first area of the phase change material, the second transmission line coupled to a second area of the phase change material, the first electrode coupled to a third area of the phase change material, and the second electrode coupled to a fourth area of the phase change material;
• and
• wherein when a direct current is sent from the first electrode to the second electrode through the phase change material, the phase change material changes state from a high resistance state to a low resistance state allowing transmission from the first transmission line to the second transmission line.