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US 2014/0191127 A1Published application
Contamination reduction electrode for particle detector
AssigneeICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
InventorStefan Lanio
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Abstract
A charged particle detector arrangement is described. The detector arrangement includes a detection element and a collector electrode configured to collect charged particles released from the detection element upon impact of signal charged particles.
Claims17
A charged particle detector arrangement, comprising:
- a detection element configured to produce a charged particle signal;
- and
- a collector electrode configured to collect charged particles released from the detection element upon impact of signal charged particles.
A charged particle beam device, comprising:
- a charged particle source;
- and
- a charged particle detector arrangement comprising:
- a detection element configured to produce a charged particle signal;
- and
- a collector electrode configured to collect charged particles released from the detection element upon impact of signal charged particles.
3 more elements
A method of operating a charged particle detector arrangement, the method comprising:
- providing a charged particle detector arrangement, comprising a detection element configured to produce a charged particle signal and a collector electrode arranged to collect charged particles released from the detection element upon impact of signal charged particles;
- applying a biasing potential to the collector electrode, wherein the potential is positive with respect to the detection element.
Dependencies are inferred from the claim text.