Etching apparatus for substrate and method of etching using the same

An etching apparatus comprising:

• a receiving container which receives a substrate and comprises:
• a bottom plate, and a plurality of bottom through holes defined in the bottom plate and through which an etchant is drained from the receiving container;
• and
• a plurality of side walls extended from the bottom plate;
• a first inside wall inside the side walls, and a plurality of side through holes defined in a lower portion of the first inside wall and through which the etchant is supplied to the receiving container;
• a second inside wall inside the side walls and facing the first inside wall, and the plurality of side through holes defined in a lower portion of the second inside wall and through which the etchant is supplied to the receiving container;
• a first spraying unit which supplies the etchant into the receiving container;
• and
• a second spraying unit which is adjacent to the first spraying unit, faces a side wall of the receiving container and supplies the etchant into the receiving container.

A method of etching a substrate using an etching apparatus, the method comprising:

• moving an opening and closing driving part of the etching apparatus upward to close bottom through holes defined in a bottom plate of a receiving container of the etching apparatus and through which an etchant is drained from the receiving container;
• supplying the etchant to the receiving container in a closed state of the bottom through holes to fill the receiving container with the etchant at a predetermined level;
• moving the opening and closing driving part downward to open the bottom through holes defined in the bottom plate and drain the etchant from the receiving container;
• supplying the etchant to the receiving container in an open state of the bottom through holes to maintain a level of the etchant at a constant level in the receiving container;
• and
• stopping the supplying the etchant to the receiving container and the draining the etchant from the receiving container,
• wherein the etching apparatus comprises:
• the receiving container comprising the bottom plate, the bottom through holes defined in the bottom plate, and a plurality of side walls;
• and
• the opening and closing driving part comprising a plurality of protruding portions configured to be inserted into the bottom through holes defined in the bottom plate.