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US 2014/0190824 A1Published application
Nanogap transducers with selective surface immobilization sites
AssigneeIntel Corporation
InventorsGrace M. Credo, Oguz H. Elibol
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Abstract
Embodiments of the invention provide transducers capable of functioning as electronic sensors and redox cycling sensors. Transducers comprise two electrodes separated by a nanogap. Molecular binding regions proximate to and within the nanogap are provided. Methods of fabricating nanogap transducers and arrays of nanogap transducers are also provided. Arrays of individually addressable nanogap transducers can be disposed on integrated circuit chips and operably coupled to the integrated circuit chip.
Claims34
A device comprising,
- a substrate having a surface, and
- a transducer disposed on the substrate surface, wherein the transducer comprises:
- a first electrode and a second electrode wherein the first and the second electrodes are each coupled to conducting lines through which voltage can be applied to the first and second electrodes independently and a current measured from each of the first and second electrodes independently, and wherein the first electrode has a face and the second electrode has a face and the face of the first electrode is separated from the face of the second electrode by a distance that is less than 500 nm,
- a cavity capable of containing a fluid between the face of the first electrode and the face of the second electrode,
- an access hole through the second electrode that is capable of allowing a fluid to enter and leave the cavity,
- a layer of preferentially functionalizable dielectric material disposed on the second electrode wherein the preferentially functionalizable dielectric layer has an exposed surface within the access hole, and
- a layer of dielectric material that is not preferentially functionalizable disposed on the layer of preferentially functionalizable dielectric material.
4 more elements
A device comprising,
- a substrate having a surface, and
- a transducer disposed on the substrate surface, wherein the transducer comprises:
- a first electrode and a second electrode wherein the first and the second electrodes are each coupled to conducting lines through which voltage can be applied to the first and second electrodes independently and a current measured from each of the first and second electrodes independently, and wherein the first electrode has a face and the second electrode has a face and the face of the first electrode is separated from the face of the second electrode by a distance that is less than 500 nm,
- a cavity capable of containing a fluid between the face of the first electrode and the face of the second electrode,
- an access hole through the second electrode that is capable of allowing a fluid to enter and leave the cavity, and
- a preferentially functionalizable dielectric region disposed on a region of the face of the first electrode wherein the preferentially functionalizable dielectric region comprises an exposed surface.
3 more elements
A device comprising,
- a substrate having a surface, and
- a transducer disposed on the substrate surface, wherein the transducer comprises:
- a first electrode and a second electrode wherein the first and the second electrodes are each coupled to conducting lines through which voltage can be applied to the first and second electrodes independently and a current measured from each of the first and second electrodes independently, and wherein the first electrode has a face and the second electrode has a face and the face of the first electrode is separated from the face of the second electrode by a distance that is less than 500 nm,
- a cavity capable of containing a fluid between the face of the first electrode and the face of the second electrode,
- an access hole through the second electrode that is capable of allowing a fluid to enter and leave the cavity, and
- a preferentially functionalizable region in the first electrode wherein the first electrode is disposed on the substrate surface, wherein the first electrode comprises a hole, wherein the preferentially functionalizable region comprises a region of the substrate surface that is exposed through the hole in the first electrode.
3 more elements
A system comprising,
- a computer operably coupled to a integrated circuit chip wherein the integrated circuit chip comprises an array of transducers disposed on a surface of the integrated circuit chip,
- a fluidic system capable of supplying fluids to the surface of the integrated circuit chip comprising the array of transducers,
- wherein transducers that make up the array are electrically coupled to and individually addressable through electronics in the integrated circuit chip, and wherein a transducer comprises:
- a first electrode and a second electrode wherein the first and the second electrodes are each coupled to conducting lines through which voltage can be applied to the first and second electrodes independently and a current measured from each of the first and second-electrodes independently, and wherein the first electrode has a face and the second electrode has a face and the face of the first electrode is separated from the face of the second electrode by a distance that is less than 500 nm,
- a cavity capable of containing a fluid between the face of the first electrode and the face of the second electrode,
- an access hole through the second electrode that is capable of allowing a fluid to enter and leave the cavity, and
- a preferentially functionalizable dielectric region disposed on a region of the face of the first electrode wherein the preferentially functionalizable dielectric region comprises an exposed surface.
4 more elements
Dependencies are inferred from the claim text.