Fluid control valve and mass flow controller
AssigneeHORIBA STEC, Co., Ltd.
InventorShigeyuki Hayashi
Life of this patent
Estimating the term…
Loading patent…
AssigneeHORIBA STEC, Co., Ltd.
InventorShigeyuki Hayashi
Estimating the term…
In order to, in a short period of time, reduce to zero a measured flow rate value measured after fully closing a fluid control valve, the fluid control valve having a configuration suitable to decrease the inside volume of the fluid control valve is configured together with a valve element member, and a valve seat block provided with: an in-valve flow path that is formed inside of the valve seat block; and a valve seat surface that is brought into contact with or separated from a seating surface of the valve element member is provided with a cutout that is formed in a part of a protruded rim so as to be communicatively connected to a downstream side flow path.
A fluid control valve configured to include a valve seat block and a valve element member, the valve seat block comprising:
A fluid control valve configured to include a valve seat block and a valve element member, the valve seat block comprising:
Dependencies are inferred from the claim text.