Nozzle cleaning device and coater provided with it
AssigneeShenzhen China Star Optoelectronics Technology Co., Ltd.
InventorsYueyan Zhang, Wende Huang, Houyi Zhu
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AssigneeShenzhen China Star Optoelectronics Technology Co., Ltd.
InventorsYueyan Zhang, Wende Huang, Houyi Zhu
Estimating the term…
A nozzle cleaning device and a coater provided with the nozzle cleaning device are provided, the nozzle cleaning device comprise a cleaner, a vacuum pipe and a vacuum pump; the cleaner has a recessed hole coinciding in shape with the nozzle of the coater for receiving the nozzle of the coater, and the inner wall of the recessed hole is provided with a plurality of through-holes; one end of the vacuum pipe is connected to said a plurality of through-holes, and the other end of the vacuum pipe is connected to the vacuum pump. The nozzle cleaning device of the present invention can be used conveniently to remove the photoresist residue so as to clean the nozzle, which effectively improves the product yield and the production efficiency, and reduces the cost due to needing no expensive nanomaterials.
A nozzle cleaning device comprising a cleaner, a vacuum pipe and a vacuum pump;
A coater comprising:
A coater comprising:
Dependencies are inferred from the claim text.