Gas flow rate measuring apparatus

A gas flow rate measuring apparatus including

• a gas flow rate detection circuit configured to detect a current flowing through at least one resistive element disposed in a gas flow path or a voltage generated in response to the current to output a gas flow rate detection signal in accordance with a flow rate of gas flowing in the gas flow path, and
• a gas temperature detection element for detecting a temperature of the gas in the gas flow path or a substrate temperature detection element for detecting a temperature of a substrate provided in the inside of an integrated circuit,
• the gas flow rate measuring apparatus correcting characteristics of the gas flow rate detection signal on a basis of temperature detection signal obtained from the gas temperature detection element or the substrate temperature detection element,
• wherein the gas flow rate measuring apparatus comprises signal conversion means for correcting a characteristic bend displaced by more than a certain fixed amount from a target characteristic of the gas flow rate detection signal.