Mems device and a method of using the same
OwnerBiao Zhang, Tao Juinventors
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Abstract
A method of using a MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism. A magnetic field is generated by a magnetic source, and is detected by a magnetic sensor. The magnetic field varies at the location of the magnetic sensor; and the variation of the magnetic field is associated with the movement of the proof-mass of the MEMS gyroscope. By detecting the variation of the magnetic field, the movement and thus the target angular velocity can be measured.
Claims12
A method of measuring an angular velocity by using a MEMS gyroscope, the method comprising:
- driving the proof-mass to move in a driving mode using a group of capacitors;
- measuring a background magnetic signal using a reference magnetic sensor;
- storing the measurement from the reference magnetic sensor;
- generating a target magnetic field that is associated with a movement of a proof-mass of the MEMS gyroscope;
- activating a signal magnetic sensor for measuring the background magnetic signal and the generated target magnetic signal;
- comparing the measurements from the reference and signal magnetic sensors so as to obtain the target magnetic field;
- and
- extracting the angular velocity from the target magnetic field.
A method of detecting a target angular velocity, comprising:
- providing a MEMS gyroscope that comprises a movable proof-mass, a magnetic source, and a magnetic sensor, wherein the proof-mass is capable of moving in response to the target angular velocity under the Coriolis effect, and wherein the magnetic source is capable of generating a magnetic field that varies with the movement of the proof-mass, and wherein the magnetic sensor is capable of detecting the magnetic field from the magnetic source;
- detecting a background magnetic signal using a reference sensor;
- storing the detected background magnetic signal by the reference sensor;
- causing the proof-mass to vibrate using a group of capacitors;
- generating the magnetic field by the magnetic source;
- detecting a variation of the magnetic field by the magnetic sensor;
- and
- extracting the angular velocity from the variation of the magnetic field.
Dependencies are inferred from the claim text.