Method for manufacturing charged particle beam lens
AssigneeCanon Kabushiki Kaisha
InventorsYutaka Setomoto, Takahisa Kato
Life of this patent
Estimating the term…
Abstract
There is provided a method for manufacturing a charged particle beam lens having a bonded electrode obtained by bonding at least a first conductive substrate having a first through-hole and a second conductive substrate having a second through-hole. The above method includes: forming the first through-hole in the first conductive substrate; forming the second through-hole in the second conductive substrate; and bonding the first conductive substrate and the second conductive substrate so that the first through-hole and the second through-hole communicate with each other.
Claims9
A method for manufacturing a charged particle beam lens having a bonded electrode obtained by bonding at least a first conductive substrate having a first through-hole and a second conductive substrate having a second through-hole, the method comprising:
- forming the first through-hole in the first conductive substrate;
- forming the second through-hole in the second conductive substrate;
- and
- bonding the first conductive substrate and the second conductive substrate so that the first through-hole and the second through-hole communicate with each other.
A method for manufacturing a charged particle beam lens having a bonded electrode obtained by bonding at least a second conductive substrate and a first conductive substrate having a first through-hole, the method comprising:
- forming the first through-hole in the first conductive substrate;
- bonding the first conductive substrate and the second conductive substrate;
- and
- forming a second through-hole in the second conductive substrate so as to communicate with the first through-hole.
A method for manufacturing a charged particle beam lens having a bonded electrode obtained by bonding at least a first conductive substrate and a second conductive substrate, the method comprising:
- forming a first through-hole in the bonded electrode from a side of the first conductive substrate;
- and
- forming a second through-hole in the bonded electrode from a side of the second conductive substrate so as to communicate with the first through-hole.
A method for manufacturing a charged particle beam lens having a bonded electrode obtained by bonding at least a first conductive substrate having a first hole and a second conductive substrate having a second hole, the method comprising:
- forming the first hole in the first conductive substrate;
- forming the second hole in the second conductive substrate;
- bonding the first conductive substrate and the second conductive substrate;
- and
- enabling the first hole to communicate with the second hole.
Dependencies are inferred from the claim text.