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US 2014/0190003 A1Published application
Inductor with laminated yoke
AssigneeInternational Business Machines Corporation
InventorsRobert E. Fontana, JR., William J. Gallagher, Philipp Herget, Eugene J. O'Sullivan, Lubomyr T. Romankiw, Naigang Wang, Bucknell C. Webb
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Abstract
A method for forming a thin film inductor having yokes, one or more of which is laminated, and one or more conductors passing between the yokes. The laminated yoke or yokes help reduce eddy currents and/or hysteresis losses.
Claims4
A method, comprising:
- forming a bottom yoke above a substrate;
- forming one or more conductors above the bottom yoke and separated therefrom by an insulating material;
- and
- forming a top yoke above the one or more conductors and separated therefrom by an insulating material;
- wherein at least one of forming the bottom yoke and forming the top yoke includes a procedure comprising:
- applying a first mask;
- depositing a first ferromagnetic layer in an area not masked by the first mask;
- depositing a nonmagnetic layer above the first ferromagnetic layer;
- applying a second mask above the nonmagnetic layer;
- and
- depositing a second ferromagnetic layer in an area not masked by the second mask.
8 more elements
Dependencies are inferred from the claim text.