Magnetic field sensor and method of fabricating a magnetic field sensor having a plurality of vertical hall elements arranged in at least a portion of a polygonal shape

A method of fabricating a magnetic field sensor, comprising:

• providing a semiconductor substrate having a planar surface;
• forming, on the planar surface, a plurality of primary vertical Hall elements, wherein each one of the plurality of primary vertical Hall elements comprises a respective plurality of vertical Hall element contacts arranged in a respective line of primary vertical Hall element contacts, wherein the lines of primary vertical Hall element contacts are arranged in a pattern representative of at least a portion a polygonal shape, wherein the plurality of primary vertical Hall elements includes a primary vertical Hall element having a respective line of vertical Hall element contacts not parallel to a line of vertical Hall element contacts of another one of the plurality of primary vertical Hall elements, wherein each one of the plurality of primary vertical Hall elements is configured to generate a respective magnetic field signal indicative of a projected component of a magnetic field projected upon the plane of the planar surface relative to an angular position of the respective vertical Hall element;
• and
• forming, on the semiconductor substrate, an electronic circuit coupled to each one of the plurality of primary vertical Hall elements, wherein the electronic circuit is configured to generate an output signal representative of an angle of the projected component of the magnetic field.

A magnetic field sensor, comprising:

• a semiconductor substrate having a planar surface;
• a plurality of magnetic field sensing elements disposed on the planar surface, the plurality of magnetic field sensing elements having a respective plurality of major response axes, each major response axis parallel to the major surface, wherein the plurality of major response axes is arranged in a pattern representative of at least a portion of a polygonal shape, wherein the plurality of magnetic field sensing elements includes a primary vertical Hall element having a major response axis not parallel to major response axis of another one of the plurality of magnetic field sensing elements, wherein each one of the plurality of magnetic field sensing elements is configured to generate a respective magnetic field signal indicative of a projected component of a magnetic field projected upon the plane of the planar surface relative to an angular position of the response axis of the respective magnetic field sensing element;
• and
• an electronic circuit disposed on the planar surface and coupled to each one of the plurality of magnetic field sensing elements, wherein the electronic circuit is configured to generate an output signal indicative of an angle of the projected component of the magnetic field.

A method of fabricating a magnetic field sensor, comprising:

• providing a semiconductor substrate having a planar surface;
• forming, on the planar surface, a plurality of magnetic field sensing elements having a respective plurality of major response axes, each major response axis parallel to the major surface, wherein the plurality of major response axes is arranged in a pattern representative of at least a portion of a polygonal shape, wherein the plurality of magnetic field sensing elements includes a primary vertical Hall element having a major response axis not parallel to major response axis of another one of the plurality of magnetic field sensing elements, wherein each one of the plurality of magnetic field sensing elements is configured to generate a respective magnetic field signal indicative of a projected component of a magnetic field projected upon the plane of the planar surface relative to an angular position of the response axis of the respective magnetic field sensing element;
• and
• forming, on the semiconductor substrate, an electronic circuit coupled to each one of the plurality of magnetic field sensing elements, wherein the electronic circuit is configured to generate an output signal indicative of an angle of the projected component of the magnetic field.