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AssigneeBeijing Boe Optoelectronics Technology Co., Ltd.
InventorZHENYU XIE
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According to embodiments of the invention, there are provided a TFT array substrate, a manufacturing method thereof and a liquid crystal display. The manufacturing method comprises manufacturing a pattern including a gate electrode, a gate insulating layer pattern with a via hole, a pattern including an active layer, a pattern including source and drain electrodes and a pattern including a first electrode on a substrate. The formation of the gate insulating layer pattern with the via hole and the pattern including the active layer are completed through one patterning process, the pattern including the gate electrode at least includes the gate electrode and a gate leading wire, the via hole of the gate insulating layer is located over the gate leading wire, and the active layer is located over the gate electrode.
A manufacturing method of a TFT array substrate, which comprises manufacturing a pattern including a gate electrode, a gate insulating layer pattern with a via hole, a pattern including an active layer, a pattern including source and drain electrodes and a pattern including a first electrode on a substrate, wherein,
The manufacturing method according to claim I, wherein, the formation of the gate insulating layer pattern with the via hole and the pattern including the active layer through one patterning process includes:
A TFT array substrate, comprising a pattern including a gate electrode, a pattern including source and drain electrodes and a pattern including a first electrode that are disposed on a substrate, wherein the array substrate further comprises:
Dependencies are inferred from the claim text.