Method to Improve the Operational Robustness and Safety of Combinatorial Processing Systems

A combinatorial processing system, the system comprising:

• a wet etch module, wherein the wet etch module is operable to combinatorially etch at least two site-isolated regions on a surface of a substrate;
• wherein the wet etch module comprises:
• a dispense manifold operable to dispense fluids;
• a mixing vessel unit operable to mix at least two fluids wherein the at least two fluids are dispensed from the dispense manifold;
• a reactor unit operable to receive at least one fluid from the dispense manifold or the mixing vessel unit;
• wherein the reactor unit is operable to process a first site-isolated region on the substrate in a first manner and process a second site-isolated region on the substrate in a second manner;
• a secondary containment unit operable to receive fluid leaks from the dispense manifold, mixing vessel unit, or reactor unit;
• a main leak containment tray operable to receive fluid leaks from the dispense manifold, mixing vessel unit, reactor unit, or secondary containment unit;
• and
• a first leak sensor coupled to the secondary containment unit and operable to detect a fluid leak wherein upon detecting a fluid leak by the first leak sensor, a warning is generated.
• wherein the generated warning allows the processing of a substrate within the wet etch module to finish.