Semiconductor inspection apparatus and semiconductor inspection method

A semiconductor inspection apparatus comprising:

• a test-program execution part configured to execute a test program by applying a specific signal to a test-signal input pin of a device to be tested in accordance with the test program;
• a signal-condition detection part configured to detect an unstable region and a stable region of a signal at a signal output pin of the device to be tested while the test program is executed;
• a test-time calculation part configured to calculate an optimum test time having a duration from a period of the unstable region to a certain period at a leading portion of the stable region subsequent to the unstable region based on the unstable and stable regions detected by the signal-condition detection part;
• a test-program modification part configured to reflect the optimum test time in the test program;
• and
• a signal waveform importing part configured to import a signal at the signal output pin of the device to be tested based on a test time written in the test program in which the optimum test time is reflected,
• wherein the test-program execution part executes the test program again after the optimum test time is reflected in the test program by the test-program modification part.