Vibration-controlled substrate handling robots, systems, and methods

A robot vibration reduction method, comprising:

• supporting a substrate with an end effector of a robot;
• providing a sensor coupled to the robot;
• detecting a vibration of the robot with the sensor as the robot transports the substrate;
• determining one or more conditions under which an undesirable amount of vibration occurs;
• and
• minimizing at least some of the vibration of the end effector of the robot.

A vibration-controlled substrate transport system, comprising:

• a chamber;
• a robot received in the chamber, the robot having an end effector operable to transport a substrate;
• and
• a sensor coupled to the robot, the sensor operable to detect a vibration of the robot as the robot supports the substrate.