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AssigneeNano-Electronic and Photonic Devices and Circuits, LLC
InventorAlexander Kastalsky
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Two methods of producing nano-pads of catalytic metal for growth of single walled carbon nanotubes (SWCNT) are disclosed. Both methods utilize a shadow mask technique, wherein the nano-pads are deposited from the catalytic metal source positioned under the angle toward the vertical walls of the opening, so that these walls serve as a shadow mask. In the first case, the vertical walls of the photo-resist around the opening are used as a shadow mask, while in the second case the opening is made in a thin layer of the dielectric layer serving as a shadow mask. Both methods produce the nano-pad areas sufficiently small for the growth of the SWCNT from the catalytic metal balls created after high temperature melting of the nano-pads.
A method of producing the nano-pads of catalytic metal for growth of the Single Walled Carbon Nanotubes (SWCNT) using a shadow mask technique, in which the original opening in the photo-resist deposited on the substrate is used to create the nano-pad of catalytic metal of a much smaller area than that of said original opening, wherein the walls of said original opening in the photo-resist serve as a shadow mask for the angled deposition of said nano-pads of catalytic metal, when the catalytic metal source is positioned under an angle to the direction normal to the substrate plane, so that said angle and the said walls of said original opening control the area of the nano-pads;
The method of producing the nano-pads of catalytic metal for growth of the SWCNT using a shadow mask technique, in which the original opening is formed in a thin dielectric layer deposited on the contact layer to create the nano-pad of catalytic metal of a much smaller area than that of said original opening, wherein the walls of said original opening in the said dielectric layer serve as a shadow mask for the angled deposition of said nano-pads of catalytic metal, when the catalytic metal source is positioned under an angle to the direction normal to the substrate plane, so that said angle and the height of the walls of said original opening determine the size of the nano-pads;
Dependencies are inferred from the claim text.