Substrate for carbon nanotube growth and method for manufacturing the same

Abstract

Provided is a substrate for carbon nanotube growth in which no metal particles as a catalyst aggregates and a method for manufacturing the substrate. A substrate for carbon nanotube growth 1 includes a base plate 2, a catalyst 3, a form-defining material layer 4 which allows the catalyst 3 to be dispersed and arranged, and a covering layer 5 which has a metal oxide to cover the catalyst. A method for manufacturing a substrate for carbon nanotube growth 1 includes a step of sputtering on a base plate 2 a metal which forms a catalyst 3 and oxidizing the surface of the metal, a step of sputtering a form-defining material on the base plate 2, and a step of further sputtering on the form-defining material a metal which forms a catalyst 3 and oxidizing the surface of the metal.

Dependencies are inferred from the claim text.