Polishing pad
AssigneeToray Industries, Inc.
InventorsNana Takeuchi, Seiji Fukuda, Ryoji Okuda, Shigetaka Kasai
Life of this patent
Estimating the term…
Loading patent…
AssigneeToray Industries, Inc.
InventorsNana Takeuchi, Seiji Fukuda, Ryoji Okuda, Shigetaka Kasai
Estimating the term…
A polishing pad includes at least a cushion layer and a polishing layer including a groove, on a polishing surface, having side surfaces and a bottom surface, wherein at least one of the side surfaces includes a first side surface that extends continuously to the polishing surface and forms an angle α with the polishing surface, and a second side surface that extends continuously to the first side surface and forms an angle β with a plane parallel to the polishing surface, the angle α is larger than 90 degrees, the angle β is not smaller than 85 degrees, and the angle β is smaller than the angle α, a bending point depth is not less than 0.4 mm and not more than 3.0 mm, and the cushion layer has a distortion constant of not less than 7.3×10−6 μm/Pa and not more than 4.4×10−4 μm/Pa.
A polishing pad comprising at least a polishing layer and a cushion layer, wherein
Dependencies are inferred from the claim text.