Method and system for manufacturing semiconductor device
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChien-Ling Hwang, Bor-Ping Jang, Yi-Li Hsiao, Hsin-Hung Liao, Chung-Shi Liu
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Abstract
A method for manufacturing a semiconductor device is provided. The method contains steps of providing the semiconductor device including a working area; directing a medium flow onto the working area; configuring a lens in contact with the medium flow; and directing a laser beam to the working area through the lens and the medium flow. A laser processing for manufacturing a semiconductor device is also provided.
Claims21
A laser processing system for manufacturing a semiconductor device including a working area, comprising:
- a laser beam outlet providing therethrough a laser beam to the working area;
- and
- a medium providing device including a first passage, a second passage and a bridging part connected therebetween for providing a medium onto the working area via the first passage and collecting the medium from the working area via the second passage to form a medium flow on the working area, wherein the bridging part is connected with the laser beam outlet.
A method for manufacturing a semiconductor device, comprising steps of:
- providing the semiconductor device including a working area;
- directing a medium flow onto the working area;
- configuring a lens in contact with the medium flow;
- and
- directing a laser beam to the working area through the lens and the medium flow.
A laser processing system for manufacturing a semiconductor device having a working area, comprising:
- a medium control device including a first passage and a second passage for directing a medium flow onto the working area;
- and
- a laser device providing a laser beam to the working area through the medium flow, wherein when observed from either side of the laser beam, the medium flow in the first passage has a flow direction different from that of the medium flow in the second passage.
Dependencies are inferred from the claim text.