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US 2014/0154858 A1Published application
Area-efficient capacitor using carbon nanotubes
AssigneeInternational Business Machines Corporation
InventorsDamon B. Farmer, Aaron D. Franklin, Shu-Jen Han, George S. Tulevski
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Abstract
An on-chip decoupling capacitor is disclosed. One or more carbon nanotubes are coupled to a first electrode of the capacitor. A dielectric skin is formed on the one or more carbon nanotubes. A metal coating is formed on the dielectric skin. The dielectric skin is configured to electrically isolate the one or more carbon nanotubes from the metal coating.
Claims20
A method of forming an on-chip decoupling capacitor, comprising:
- forming at least one trench in a first electrode of the capacitor;
- disposing one or more carbon nanotubes on the at least one trench of the first electrode of the capacitor;
- forming a dielectric skin on the one or more carbon nanotubes;
- and
- forming a metal coating on the dielectric skin, wherein the dielectric skin electrically isolates the one or more carbon nanotubes from the metal coating;
- and forming at least one prong on a second electrode that extends into the at least one trench of the first electrode.
3 more elements
(canceled)
A method of forming an integrated chip, comprising:
- forming at least one trench in a first electrode;
- forming a least one prong on a second electrode that extends into the at least one trench of the first electrode;
- and
- forming a separation layer between the at least one trench of the first electrode and the at least one prong of the second electrode, wherein the separation layer includes one or more carbon nanotubes having a dielectric skin on its surface.
1 more element
(canceled)
A method of forming an on-chip decoupling capacitor, comprising:
- forming a first electrode having a plurality of trenches;
- forming a second electrode having a plurality of prongs, wherein a selected prong of the second electrode extends into a selected trench of the first electrode;
- forming a separation layer between a first electrode and a second electrode, wherein forming the separating layer comprises:
- forming a mesh of carbon nanotubes on the first electrode;
- forming a dielectric skin formed on the mesh of carbon nanotubes;
- and
- forming a metal coating on the dielectric skin.
4 more elements
Dependencies are inferred from the claim text.