US 2014/0154831 A1 · Method and Device for processing at least one crystalline Silicon-wafer or a Solar-cell wafer

Abstract

In different embodiments, a method is provided for processing at least one crystalline Silicon-wafer or a Solar-cell wafer. The method may include: a movement of the wafer with respect to a laser producing a laser beam; and therefore the formation of a laser channel in the wafer by means of a laser beam, wherein a thermal budget applied on the wafer by means of the laser beam is reduced in the peripheral region of the wafer, wherein the peripheral region includes a wafer edge, through which the laser beam exits the wafer after formation of the laser channel.

Claims15

Dependent claims

A method for processing at least one crystalline silicon-wafer or a solar-cell wafer, wherein the method comprises:

moving the wafer with respect to a laser producing a laser beam;
and
therefore forming a laser channel in the wafer by means of the laser beam, wherein a thermal budget applied on the wafer by means of the laser beam is reduced in the peripheral region of the wafer, wherein the peripheral region includes a wafer edge, through which the laser beam exits the wafer after formation of the laser channel.

Dependencies are inferred from the claim text.

Facts

Application

14/094,863Filed 3 Dec 2013

Priority

DE 10 2012 111 698.93 Dec 2012

Published

5 Jun 2014

Term ends

Not estimatedThe source records don’t support an estimate.

Classification12 codes

H10P 54/00
Cutting or separating of wafers, substrates or parts of devices
B23K 26/36
Working by laser beam, e.g. welding, cutting or boring: removing material
B23K 26/364
Laser etching: for making a groove or trench, e.g. for scribing a break initiation groove
H10F 71/121
Manufacture or treatment of devices covered by this subclass: the active layers comprising only Group IV materials

Method and Device for processing at least one crystalline Silicon-wafer or a Solar-cell wafer

Life of this patent

Method and Device for processing at least one crystalline Silicon-wafer or a Solar-cell wafer

Life of this patent

Abstract

Claims15