Method of manufacturing frequency tunable terahertz transceiver
AssigneeElectronics and Telecommunications Research Institute
InventorKyung Hyun PARK
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Abstract
A method of manufacturing a frequency tunable terahertz transceiver including two separate distributed feedback lasers manufactured in one substrate, includes forming a lower clad layer on the substrate, forming an active layer on the lower clad layer, forming an upper clad layer on the active layer. And interposing first and second diffraction grating layers between the upper clad layers. A diffraction grating is manufactured by etching the first and second diffraction grating layers. The active layer is integrated into a passive waveguide. An electrode is formed on the upper clad layer.
Claims5
A method of manufacturing a frequency tunable terahertz transceiver including two separate distributed feedback lasers that are manufactured in one substrate, the method comprising:
- forming a lower clad layer on the substrate,
- forming an active layer on the lower clad layer, forming an upper clad layer on the active layer, and interposing first and second diffraction grating layers between the upper clad layer;
- manufacturing a diffraction grating by etching the first and second diffraction grating layers;
- integrating the active layer into a passive waveguide;
- and
- forming an electrode on the upper clad layer.
Dependencies are inferred from the claim text.